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MEMS tools for Micro4Nano Lab

In nanotechnology the self-assembly techniques are very important in device realization and can be used to produce devices for several application domains, offering solutions for sensing, actuation, computation and energy. Among all the application domains, Space Human Robotics domain will receive the main focus, specifically for sensing and actuating.

In particular two different kind of MEMS based on self-assembled nanomaterials will be demonstrated: nanogaps and piezo-nanorods. This approach can be applied to many nanotechnological materials, where it is necessary to develop, in a specific area, reactions or structures at nanoscale.

We assume that nanodevices (either sensors or actuators) cannot be separated from hosting microstructures for signal conditioning and/or control, both in the study phases both in their exploitation.