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Techniques available
TEM, HR-TEM, STEM, Diffraction, EFTEM, EDS and EELS Spectrum Imaging, Tomography.
Essential specifications
Point resolution (nm) 0.24
Information limit (nm) ≤ 0.15
HR STEM resolution (nm) 0.2
Cs objective (mm) 1.2
Cc objective (mm) 1.2
Focal length (mm) 1.7
Maximum eucentric tilt ± 40°
Electron source
- Schottky Field emitter with high maximum beam current (> 100 nA)
- High probe current (> 0.6 nA in a 1 nm spot)
- Small energy spread (0.7 eV@200kV or less)
- Spot drift < 1 nm/minute - High short and long term stability
STEM
- Bright Field and Annular Dark Field mode
- High sensitivity HAADF STEM detector
- Magnification range 200 x - 100 Mx
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